Company Filing History:
Years Active: 2021-2024
Title: Hironari Sasagawa: Innovator in Substrate Processing Technologies
Introduction
Hironari Sasagawa is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 8 patents. His innovative approaches have advanced the technology used in etching methods and substrate processing systems.
Latest Patents
Sasagawa's latest patents include an etching method that involves forming a film on a substrate's surface, which has a region to be etched and a mask. The mask features an opening that partially exposes the region, and the film is made from the same material as the region. This method further includes the etching of the region. Another notable patent is a substrate processing method that consists of forming a recess on a workpiece by partially etching it. This method also includes forming a film with varying thickness along the depth direction of the recess, achieved through a two-step reactant process.
Career Highlights
Hironari Sasagawa is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in developing advanced technologies that enhance substrate processing efficiency and precision.
Collaborations
Sasagawa has collaborated with notable colleagues, including Sho Kumakura and Maju Tomura. Their combined expertise has contributed to the successful development of innovative technologies in the field.
Conclusion
Hironari Sasagawa's contributions to substrate processing technologies have established him as a key figure in the industry. His innovative patents and collaborative efforts continue to influence advancements in semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.