Etching processing apparatus, etching processing system, analysis apparatus, etching processing method, and storage medium

Abstract

An etching processing apparatus includes a storage that stores a learned model of each group generated by each learning processing in a case where each processing condition acquired during execution of a specific step of an etching processing, is classified into a plurality of groups according to a difference in effects when executing the specific step, and the learning processing is performed for each group; an updating unit that updates the learned model of a specific group when an effect of executing the specific step on a test wafer using setting data included in a processing condition associated with the specific group is not equivalent to an effect associated with the specific group; and a searching unit that searches for, using the updated learned model, setting data capable of obtaining the effect associated with the specific group when the specific step is executed on the test wafer.