Location History:
- Tokyo, JP (1989)
- Kanagawa-ken, JP (1998)
- Sakura, JP (2002)
- Kawasaki, JP (1990 - 2005)
Company Filing History:
9 out of 8,898 
1 out of 832,843 Years Active: 1989-2005
Title: Hiroki Tateno: Innovator in Mask Alignment Technology
Introduction
Hiroki Tateno is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of mask alignment technology, holding a total of 10 patents. His work focuses on methods and apparatuses that enhance the precision of pattern transfer onto substrates.
Latest Patents
Among his latest patents is an innovative alignment method and apparatus that determines two sets of parameters in a single model equation for transferring a pattern of a mask onto shot areas on a substrate. This method involves the relative movement of the mask and substrate based on the determined parameters. Another notable patent involves an exposure apparatus and method that preheats a mask before exposing it to a sensitive substrate. This method computes data related to the thermal expansion saturation point of the mask, ensuring optimal exposure of the mask pattern onto the substrate.
Career Highlights
Hiroki Tateno has worked with notable companies, including Nikon Corporation, where he has honed his skills in developing advanced imaging technologies. His expertise in the field has led to numerous innovations that have impacted the industry significantly.
Collaborations
Throughout his career, Tateno has collaborated with esteemed colleagues such as Nobutaka Magome and Kyoichi Suwa. These partnerships have fostered a creative environment that has contributed to the advancement of technology in mask alignment.
Conclusion
Hiroki Tateno's contributions to the field of mask alignment technology are noteworthy. His innovative patents and collaborations with industry leaders highlight his role as a key figure in advancing imaging technologies. His work continues to influence the industry and pave the way for future innovations.