Hiroaki Tomimori

Title: Hiroaki Tomimori: Pioneering Innovator in Semiconductor Technology

Introduction

Hiroaki Tomimori is a distinguished inventor based in Kanagawa, Japan, known for his significant contributions to semiconductor technology. With an impressive portfolio of 20 patents, he has made remarkable strides in improving the reliability and efficiency of semiconductor devices.

Latest Patents

Tomimori's latest innovations include two notable patents. The first, titled "Method for manufacturing semiconductor device to form a via hole," addresses the challenge of increased via resistance caused by an altered layer after the formation of a via hole. His approach effectively prevents this issue, resulting in enhanced reliability for semiconductor devices. This method involves several critical steps, such as forming a Titanium Nitride (TiN) film on the semiconductor substrate and using plasma processing to eliminate the altered layer.

The second patent, "Method of forming a high-k film on a semiconductor device," revolves around the careful etching of a high-k film without damaging the underlying silicon material. This process includes forming a silicon oxide film through thermal oxidation and employing a precise dry and wet etching technique to selectively remove materials while preserving the integrity of the substrate. The careful control of the etching solution temperature, ideally at or below 180 degrees Celsius, exemplifies Tomimori's dedication to high-quality semiconductor fabrication.

Career Highlights

Throughout his career, Hiroaki Tomimori has worked with esteemed companies such as NEC Electronics Corporation and NEC Corporation. His work at these leading firms has allowed him to refine his expertise in semiconductor technologies and contribute to groundbreaking innovations in the field.

Collaborations

Tomimori has had the opportunity to collaborate with notable colleagues, including Hidemitsu Aoki and Norio Okada. These partnerships have been instrumental in driving forward innovative solutions and refining complex technological processes, showcasing the collaborative spirit inherent in the field of semiconductor research.

Conclusion

In conclusion, Hiroaki Tomimori stands out as a leading inventor in the semiconductor industry, with a robust portfolio of patents that not only advance technology but also enhance the performance of electronic devices. His innovative methodologies and collaborative efforts with esteemed colleagues underscore his pivotal role in shaping the future of semiconductor technology.