The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2007
Filed:
Jan. 05, 2004
Masayuki Takashima, Sodegaura, JP;
Yoshiko Kasama, Kawasaki, JP;
Hiroaki Tomimori, Kawasaki, JP;
Hidemitsu Aoki, Kawasaki, JP;
Masayuki Takashima, Sodegaura, JP;
Yoshiko Kasama, Kawasaki, JP;
Hiroaki Tomimori, Kawasaki, JP;
Hidemitsu Aoki, Kawasaki, JP;
Kanto Chemical Co., Inc., Tokyo, JP;
NEC Electronics Corporation, Kanagawa, JP;
Abstract
A cleaning solution for semiconductor substrates comprising a nonionic surface active agent of the formula (1) and/or the formula (2), a chelating agent and a chelating accelerator:CH—(CH)—O—(CHO)—X   (1)wherein l, m and n independently represent a positive number, and X represents a hydrogen atom or a hydrocarbon group;CH—(CH)—O—(CHO)—(CHO)—X   (2)wherein a, b, d, x and y independently represent a positive number, b and x are different, and X represents a hydrogen atom or a hydrocarbon group.