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Toyonaka, Japan

Hideo Haraguchi

USPTO Granted Patents = 13

Average Co-Inventor Count = 2.9

ph-index = 9

Forward Citations = 268(Granted Patents)

Company Filing History:

13 out of 27,375

Matsushita Electric Industrial Co., Ltd.

Years Active: 1997-2009

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13 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7513214 - Plasma processing method and apparatus (2009-04-07),

2. 6808759 - Plasma processing method and apparatus (2004-10-26),

3. 6648976 - Apparatus and method for plasma processing (2003-11-18),

4. 6642533 - Substrate detecting method and device (2003-11-04),

5. 6447613 - Substrate dechucking device and substrate dechucking method (2002-09-10),

6. 6340281 - Method and apparatus for positioning a disk-shaped object (2002-01-22),

7. 6276892 - Wafer handling apparatus (2001-08-21),

8. 6255223 - Substrate handling method and apparatus, and attractive force inspection method and apparatus used therewith (2001-07-03),

9. 6254683 - Substrate temperature control method and device (2001-07-03),

10. 6177646 - Method and device for plasma treatment (2001-01-23),

11. 5922223 - Plasma processing method and apparatus (1999-07-13),

12. 5851296 - Vacuum processing apparatus and method (1998-12-22),

13. 5636963 - Method of handling wafers in a vacuum processing apparatus (1997-06-10),

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