The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2001
Filed:
May. 20, 1999
Applicant:
Inventors:
Izuru Matsuda, Kadoma, JP;
Hideo Haraguchi, Toyonaka, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/600 ; H05H 1/00 ;
U.S. Cl.
CPC ...
C23C 1/600 ; H05H 1/00 ;
Abstract
In processing the surface of a substrate,that is held with its under-surface in contact with a substrate holder,in a vacuum chamber,, the temperature of substrate,is controlled by supplying a heat-conductive gas between the substrate,and substrate holder,. Supply and evacuation of the heat-conductive gas are effected rapidly at high flow rate from both supply line,and evacuation line,using bypass lines,, while pressure regulation is effected with a low flow rate.