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Izuru Matsuda

USPTO Granted Patents = 14

Average Co-Inventor Count = 2.5

ph-index = 6

Forward Citations = 232(Granted Patents)

Location History:

Takatsuki, JP (1996)
Ibaraki, JP (2003 - 2008)
Kadoma, JP (2001 - 2009)

Company Filing History:

14 out of 27,375

Matsushita Electric Industrial Co., Ltd.

Years Active: 1996-2009

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14 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 7513214 - Plasma processing method and apparatus (2009-04-07),

2. 7406925 - Plasma processing method and apparatus (2008-08-05),

3. 7292056 - Membrane with bumps, method of manufacturing the same, and method of testing electrical circuit (2007-11-06),

4. 6864640 - Plasma processing method and apparatus thereof (2005-03-08),

5. 6830653 - Plasma processing method and apparatus (2004-12-14),

6. 6808759 - Plasma processing method and apparatus (2004-10-26),

7. 6648976 - Apparatus and method for plasma processing (2003-11-18),

8. 6642533 - Substrate detecting method and device (2003-11-04),

9. 6447613 - Substrate dechucking device and substrate dechucking method (2002-09-10),

10. 6340281 - Method and apparatus for positioning a disk-shaped object (2002-01-22),

11. 6276892 - Wafer handling apparatus (2001-08-21),

12. 6255223 - Substrate handling method and apparatus, and attractive force inspection method and apparatus used therewith (2001-07-03),

13. 6254683 - Substrate temperature control method and device (2001-07-03),

14. 5514243 - Dry etching apparatus (1996-05-07),

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