The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2002
Filed:
Nov. 19, 1999
Hideo Haraguchi, Toyonaka, JP;
Izuru Matsuda, Kadoma, JP;
Abstract
It is the object of the invention to provide a substrate dechucking device and a substrate dechucking method for safely dechucking from a substrate holder a substrate which is being held in the substrate holder. The substrate dechucking device dechucks from the substrate holder a substrate which is being held in the substrate holder in a state where the substrate is electrically charged and bears residual suction force, said device comprising a lifter for lifting a substrate, said lifter being capable of protruding and retracting from the substrate holder, a drive source for generating a driving force to cause the lifter to protrude and retract, and a pair of magnetic coupling portions being disposed to face to each other, one of the pair of magnetic coupling portions being provided in a movable member which is moved by the drive source, the other of the pair of magnetic coupling portions being mounted to the lifter, thereby transmitting the driving force of the drive source to the lifter via the magnetic coupling portions.