Company Filing History:
Years Active: 1999-2005
Title: Haruo Iwasaki: Innovator in Semiconductor Technology
Introduction
Haruo Iwasaki is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His work focuses on advanced photomask techniques and methods for pattern formation in semiconductor manufacturing.
Latest Patents
Iwasaki's latest patents include innovative technologies such as a photomask and pattern forming method used in a thermal flow process. This invention relates to a photomask designed for a thermal flow process, where a resist is applied to a semiconductor integrated circuit layer. The resist is patterned through the photomask, forming openings that correspond to the exposure openings. The patterned resist is then heated, causing the openings to shrink. Notably, the exposure openings are shaped to compensate for anisotropic deformation during this process, ensuring that the final openings achieve the desired shape.
Another significant patent is the Levenson phase shift mask and method for forming fine patterns using this technology. These Levenson masks minimize the effects of optical proximity by incorporating patterns with shielding regions sandwiched between shifter and non-shifter regions. The design of these masks allows for multiple exposures, enhancing the precision of fine pattern formation.
Career Highlights
Throughout his career, Haruo Iwasaki has worked with notable companies, including NEC Corporation and NEC Electronics Corporation. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.
Collaborations
Iwasaki has collaborated with esteemed colleagues such as Tsuyoshi Yoshii and Shinji Ishida. Their joint efforts have further advanced the field of semiconductor manufacturing and technology.
Conclusion
Haruo Iwasaki's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in semiconductor manufacturing processes.