Location History:
- Wappingers Falls, NY (US) (2001)
- Kanagawa-ken, JP (2000 - 2011)
- Kanagawa, JP (2004 - 2017)
Company Filing History:
3 out of 52,722 
2 out of 30 
1 out of 2,508 
Years Active: 2000-2017
Title: Haruki Nojo: Innovator in Semiconductor Polishing Technologies
Introduction
Haruki Nojo is a prominent inventor based in Kanagawa, Japan, known for his significant contributions to the field of semiconductor polishing technologies. With a total of nine patents to his name, Nojo has developed innovative solutions that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of Nojo's latest patents is a chemical mechanical polishing composition and process. This invention aims to provide a polishing slurry composition that effectively reduces the occurrence of scratches during the polishing of semiconductor substrates. The method involves using a polishing slurry that contains metal oxide particles, water-soluble organic polymers, and water. This composition is designed to achieve a maximum polishing rate while minimizing scratches.
Another notable patent is related to periodic acid compositions for polishing ruthenium and low-K substrates. This method involves polishing a semiconductor substrate surface that has ruthenium features and dielectric materials. The aqueous composition used contains periodic acid, silica abrasive, and an amine to adjust the pH. The invention boasts a removal selectivity of ruthenium to low-K dielectric greater than 20:1, making the polishing process efficient and effective.
Career Highlights
Throughout his career, Haruki Nojo has worked with esteemed companies such as Toshiba Corporation and DuPont Air Products Nanomaterials, LLC. His experience in these organizations has contributed to his expertise in semiconductor technologies and polishing processes.
Collaborations
Nojo has collaborated with notable colleagues, including Rempei Nakata and Masako Kodera, who have also made significant contributions to the field of semiconductor manufacturing.
Conclusion
Haruki Nojo's innovative work in semiconductor polishing technologies has led to advancements that improve manufacturing processes. His patents reflect a commitment to enhancing efficiency and reducing defects in semiconductor substrates.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.