Location History:
- Ichon-shi, KR (2010 - 2011)
- Kyoungki-do, KR (2008 - 2013)
- Icheon-si, KR (2011 - 2013)
- Gyeonggi-do, KR (2010 - 2016)
Company Filing History:
Years Active: 2008-2016
Title: The Innovations of Inventor Hae-Jung Lee
Introduction: Hae-Jung Lee is a distinguished inventor based in Gyeonggi-do, South Korea, renowned for her contributions to the field of semiconductor technology. With a remarkable portfolio that includes 15 patents, her work has significantly advanced the processes involved in etching high-k metal gate stacks, which are crucial for the development of modern electronic devices.
Latest Patents: Among her notable innovations are the patents for a method for etching high-k metal gate stacks. This method involves several key steps: first, a high-k material layer is formed over a substrate, followed by the creation of an overlying layer atop the high-k material layer. A first etching process is then performed to etch the overlying layer, resulting in an overlying layer pattern. Subsequently, a spacer is formed on the sidewall of this pattern, and a second etching process is conducted using plasma that includes both an etch gas and an additive gas. This innovative approach allows for improved etch selectivity concerning the substrate, enhancing the efficiency of semiconductor fabrication.
Career Highlights: Hae-Jung Lee has had a notable career in the semiconductor industry, having worked with esteemed companies such as Hynix Semiconductor Inc. and SK Hynix Inc. Her expertise and innovative spirit have positioned her at the forefront of technology development, contributing significantly to the efficiency and capabilities of semiconductor manufacturing processes.
Collaborations: Throughout her career, Hae-Jung has collaborated with several talented professionals, including Kyeong-Hyo Lee and Jae-Kyun Lee. These partnerships have fostered an environment of creativity and technical advancement, allowing for the exploration and realization of complex semiconductor solutions.
Conclusion: Hae-Jung Lee stands as an exemplary figure in the innovation landscape, exemplifying how dedication and collaboration can lead to significant advancements in technology. Her contributions, particularly in semiconductor processing, continue to influence the industry and inspire future inventors in the field. With an impressive array of patents to her name, she remains a vital asset to the scientific community in Gyeonggi-do and beyond.