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Heidenheim, Germany

Guenther Dengel

USPTO Granted Patents = 7 (Patent Applications = 3)

Average Co-Inventor Count = 2.5

ph-index = 2

Forward Citations = 7(Granted Patents)

Location History:

Heidenheim, DE (2010 - 2017)
Heidenheim an der Brenz, DE (2017)

Company Filing History:

Carl Zeiss Smt Gmbh

Carl-zeiss-smt Ag

Years Active: 2010-2017

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9684243 - Blocking element for protecting optical elements in projection exposure apparatuses (2017-06-20),

2. 9671584 - Method and cooling system for cooling an optical element for EUV applications (2017-06-06),

3. 9041905 - Optical arrangement, in particular in a projection exposure apparatus for EUV lithography (2015-05-26),

4. 8831170 - Mirror with a mirror carrier and projection exposure apparatus (2014-09-09),

5. 8643825 - Microlithography illumination systems, components and methods (2014-02-04),

6. 7990520 - Microlithography illumination systems, components and methods (2011-08-02),

7. 7858957 - Illumination optics for projection microlithography (2010-12-28),

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