Location History:
- Heidenheim, DE (2010 - 2017)
- Heidenheim an der Brenz, DE (2017)
Company Filing History:
Years Active: 2010-2017
Title: Guenther Dengel: Innovator in Optical Technologies
Introduction
Guenther Dengel is a prominent inventor based in Heidenheim, Germany. He has made significant contributions to the field of optical technologies, particularly in projection exposure apparatuses used in microlithography. With a total of 7 patents to his name, Dengel's work has advanced the capabilities of optical systems in various applications.
Latest Patents
Dengel's latest patents include innovative solutions for enhancing the performance and efficiency of optical elements. One notable patent is for a blocking element designed to protect optical elements in projection exposure apparatuses. This invention involves a projection exposure apparatus that operates with electromagnetic radiation and includes a filter and a sensor device for monitoring the filter. The blocking element can be moved between a standby position and a bather position based on signals from the sensor device.
Another significant patent focuses on a method and cooling system for cooling optical elements in EUV applications. This method involves transferring heat from the optical element to a heat sink, utilizing a first cooling medium that flows through a cooling channel to absorb heat. Additionally, a second cooling medium is introduced into the discharge line, enhancing the cooling process.
Career Highlights
Throughout his career, Guenther Dengel has worked with esteemed companies such as Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His experience in these organizations has allowed him to develop and refine his innovative ideas in optical technologies.
Collaborations
Dengel has collaborated with notable professionals in his field, including Berndt Warm and Joachim Hartjes. These collaborations have contributed to the advancement of his inventions and the overall progress in optical technology.
Conclusion
Guenther Dengel's contributions to optical technologies through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative solutions continue to shape the future of projection exposure apparatuses and optical systems.