The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Nov. 02, 2007
Rutger Wevers, Aachen, DE;
Andreas Seifert, Aalen, DE;
Joachim Hartjes, Aalen, DE;
Guenther Dengel, Heidenheim, DE;
Rutger Wevers, Aachen, DE;
Andreas Seifert, Aalen, DE;
Joachim Hartjes, Aalen, DE;
Guenther Dengel, Heidenheim, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A mirror with a mirror carrier, as well as related apparatuses, systems and methods are disclosed. The mirror carrier can be embodied as cooling device with at least one cooling channel. Tube connections can be provided to connecting the at least one cooling channel to an inlet and an outlet of coolant. Sealing elements for a gas-tight and liquid-tight seals can be arranged between the tube connections and the mirror carrier. The field of application of the mirror can be, for example, an illumination device of a projection exposure apparatus.