Goichi Yoshidome

Title: Innovator Spotlight: Goichi Yoshidome

Introduction

Goichi Yoshidome, based in Emeryville, California, is a prolific inventor with an impressive portfolio of 21 patents. His work primarily focuses on advancements in semiconductor processing, particularly enhancing methods that impact the efficiency and effectiveness of physical vapor deposition (PVD) chambers.

Latest Patents

Among his latest innovations are two notable patents that stand out in the semiconductor field. The first patent, titled "Methods for shaping magnetic fields during semiconductor processing," outlines a method of processing a substrate in a PVD chamber where material is sputtered from a target onto a substrate. This process utilizes magnetic fields generated by upper, first, and second magnets strategically positioned within the PVD chamber to control the movement of the sputtered material, ultimately enhancing the deposition quality.

The second patent, "Etch uniformity improvement for single turn internal coil PVD chamber," introduces methods and apparatus to generate an external magnetic field aimed at improving etch or deposition uniformity in substrates within a PVD chamber. This invention features a chamber body with an interior volume, a supporting pedestal, a coil above the pedestal, and an asymmetrically arranged external magnet assembly, all designed to maintain optimal processing conditions.

Career Highlights

Goichi's career has been significantly shaped by his role at Applied Materials, Inc., a leading provider of manufacturing equipment and services for the semiconductor industry. Throughout his time there, he has demonstrated a commitment to innovation, resulting in a seemingly endless stream of contributions to semiconductor technology. His expertise and inventions continue to drive advancements within the industry.

Collaborations

Yoshidome collaborates with several talented individuals at Applied Materials, notably Keith A. Miller and Adolph Miller Allen. Their combined expertise and collaborative efforts enhance the development of advanced techniques and technologies, reinforcing the company's position at the forefront of semiconductor innovation.

Conclusion

Goichi Yoshidome's contributions to the field of semiconductor processing exemplify the kind of innovative spirit that is crucial for technological advancement. With a significant number of patents to his name, his work not only pushes the boundaries of current technology but also paves the way for future innovations in the industry.