The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2020
Filed:
Nov. 16, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Goichi Yoshidome, Albany, CA (US);
Keith A. Miller, Mountain View, CA (US);
Hamid Tavassoli, Cupertino, CA (US);
Andrew Tomko, Santa Clara, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); H01J 37/32 (2006.01); C23C 14/35 (2006.01); C23C 14/56 (2006.01); C23C 14/04 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); C23C 14/35 (2013.01); C23C 14/564 (2013.01); C23C 14/568 (2013.01); H01J 37/32623 (2013.01); H01J 37/3447 (2013.01); C23C 14/046 (2013.01);
Abstract
Embodiments of collimators and process chambers incorporating same are provided herein. In some embodiments, a collimator for use in a substrate processing chamber includes a ring; an adapter surrounding the ring and having an inner annular wall; and a plurality of spokes extending from the inner annular wall and intersecting at a central axis of the collimator.