The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 31, 2023

Filed:

Jul. 31, 2020
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Kadthala R. Narendrnath, San Jose, CA (US);

Govinda Raj, Bangalore, IN;

Goichi Yoshidome, Emeryville, CA (US);

Bopanna Ichettira Vasantha, Bangalore, IN;

Umesh M. Kelkar, Santa Clara, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); B22F 10/20 (2021.01); B33Y 80/00 (2015.01);
U.S. Cl.
CPC ...
H01J 37/32477 (2013.01); H01J 37/3211 (2013.01); H01J 37/3288 (2013.01); H01J 37/32467 (2013.01); H01J 37/32807 (2013.01); H01J 37/32853 (2013.01); H01J 37/32871 (2013.01); B22F 10/20 (2021.01); B22F 2999/00 (2013.01); B33Y 80/00 (2014.12); Y02P 10/25 (2015.11);
Abstract

A chamber component for a processing chamber is disclosed herein. In one embodiment, a chamber component for a processing chamber includes a component part body having unitary monolithic construction. The component part body has a textured surface. The textured surface includes a plurality of independent engineered macro features integrally formed with the component part body. The engineered macro features include a macro feature body extending from the textured surface.


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