Location History:
- Danbury, CT (US) (1999 - 2003)
- New York, NY (US) (2001 - 2004)
Company Filing History:
Years Active: 1999-2004
Title: Innovations by Gautam Bhandari in Chemical Vapor Deposition
Introduction
Gautam Bhandari, an accomplished inventor based in Danbury, Connecticut, holds a remarkable portfolio of 20 patents. His inventive contributions primarily revolve around advancements in chemical vapor deposition (CVD) processes, particularly for integrated circuit (IC) applications. Bhandari's work has significantly impacted semiconductor manufacturing, focusing on enhancing adhesion between CVD copper and diffusion barrier materials.
Latest Patents
Among his latest patents is a groundbreaking method for promoting adhesion of CVD copper to diffusion barrier material in integrated circuit manufacturing. The patented two-step CVD copper metallization process involves the deposition of a thin first layer of CVD copper, utilizing the precursor (hfac)Cu(1,5-Dimethylcyclooctadiene). This seed layer is instrumental in ensuring good adhesion for the subsequent fill layer of CVD copper, which is deposited using a different, more cost-effective precursor. This innovative approach not only improves adhesion through copper-to-copper bonds but also optimizes production costs by utilizing a high-deposition-rate precursor for the bulk layer.
Career Highlights
Gautam Bhandari has had a significant career in the semiconductor industry, working with reputable organizations such as Advanced Technology Materials, Inc. His expertise in chemical vapor deposition has positioned him as a key contributor to advancements in IC manufacturing technologies.
Collaborations
Throughout his career, Bhandari has collaborated with notable professionals, including Thomas H. Baum and Michael A. Todd. These partnerships have fostered an environment of innovation and have contributed to the successful development of his patented technologies.
Conclusion
Gautam Bhandari stands out as an influential inventor in the realm of chemical vapor deposition. His 20 patents reflect his dedication to improving materials and processes in the semiconductor industry. With a continued focus on innovation, Bhandari’s contributions are poised to influence future advancements in integrated circuit manufacturing.