The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2000
Filed:
Dec. 12, 1997
Gautam Bhandari, Danbury, CT (US);
Thomas H Baum, New Fairfield, CT (US);
Advanced Technology Materials, Inc., Danbury, CT (US);
Abstract
A liquid reagent delivery and vaporization system, including a housing defining a flow passage for flow of a process fluid therethrough. A vaporizer element is positioned within the housing and includes a heated vaporization surface. Liquid reagent is selectively delivered to the heated vaporization surface, to vaporize the liquid reagent and form reagent vapor for flow through the flow passage of the housing, e.g., to a chemical vapor deposition reactor for deposition of a film on a substrate. A thermal damping fluid source is arranged to selectively deliver a thermal damping fluid into the flow passage to maintain a predetermined thermal condition therein. For example, the system may be arranged to selectively terminate delivery of liquid reagent to the vaporization surface and to contemporaneously selectively initiate delivery of the thermal damping fluid into the flow passage to maintain a thermal condition thermally matches the vaporization conditions when the liquid reagent is vaporized. The use of a thermal damping fluid prevents the occurrence of undesired thermal gradients in the system when the system is cyclically operated to vaporize reagent liquid.