Gautam Banerjee

Title: Gautam Banerjee: Innovator in Semiconductor Cleaning Solutions

Introduction

Gautam Banerjee is a notable inventor based in Latham, NY (US), recognized for his contributions to the field of semiconductor cleaning solutions. With a total of 9 patents to his name, he has made significant advancements in the methods and compositions used for cleaning microelectronic devices.

Latest Patents

One of his latest patents involves a cleaning formulation designed to effectively remove copper-containing post-etch and/or post-ash residue from patterned microelectronic devices. This innovative composition includes water, a water-miscible organic solvent, an amine compound, an organic acid, and a fluoride ion source. The formulation is engineered to remove the copper-containing residues without damaging the exposed low-k dielectric and metal interconnect materials.

Another significant patent focuses on a method for wafer dicing and the composition useful for this process. This solution is designed to suppress the adherence of contamination residues or particles and to reduce or eliminate corrosion of exposed metallization areas during the dicing of a wafer by sawing. The composition comprises at least one organic acid and/or its salt, a surfactant and/or a base, and deionized water, with a pH equal to or greater than 4. Additionally, it can include a chelating agent, a defoaming agent, or a dispersing agent.

Career Highlights

Gautam Banerjee has worked with prominent companies in the industry, including Air Products and Chemicals, Inc. and DuPont Air Products Nanomaterials, LLC. His experience in these organizations has contributed to his expertise in developing innovative cleaning solutions for semiconductor applications.

Collaborations

Throughout his career, Gautam has collaborated with talented individuals such as Madhukar Bhaskara Rao and Wen Dar Liu. These collaborations have likely enriched his work and led to further advancements in his field.

Conclusion

Gautam Banerjee stands out as an influential inventor in the semiconductor industry, with a focus on cleaning solutions that enhance the performance and reliability of microelectronic devices. His innovative patents and career achievements reflect his commitment to advancing technology in this critical area.