The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Aug. 19, 2010
Madhukar Bhaskara Rao, Fogelsville, PA (US);
Gautam Banerjee, Chandler, AZ (US);
Thomas Michael Wieder, Emmaus, PA (US);
Yi-chia Lee, Danshuei Jen Taipei, TW;
Wen Dar Liu, Chupei, TW;
Aiping Wu, Macungie, PA (US);
Madhukar Bhaskara Rao, Fogelsville, PA (US);
Gautam Banerjee, Chandler, AZ (US);
Thomas Michael Wieder, Emmaus, PA (US);
Yi-Chia Lee, Danshuei Jen Taipei, TW;
Wen Dar Liu, Chupei, TW;
Aiping Wu, Macungie, PA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
The present invention relates to water-rich formulations and the method using same, to remove bulk photoresists, post-etched and post-ashed residues, residues from Al back-end-of-the-line interconnect structures, as well as contaminations. The formulation comprises: hydroxylamine; corrosion inhibitor containing a mixture of alkyl dihydroxybenzene and hydroxyquinoline; an alkanolamine, a water-soluble solvent or the combination of the two; and at least 50% by weight of water.