Fumitaka Kume

Title: Innovations of Fumitaka Kume: A Leading Inventor in Semiconductor Technology

Introduction

Fumitaka Kume is a prominent inventor based in Annaka, Japan, known for his significant contributions to semiconductor technology. With six patents to his name, Kume has developed innovative methods that enhance the manufacturing and measurement processes in the field.

Latest Patents

Among his latest inventions are two notable patents: the "Method for Manufacturing Resistivity Standard Sample" and the "Method for Measuring Resistivity of Epitaxial Wafer."

The method for manufacturing a resistivity standard sample includes several precise steps. These involve preparing a first-conductivity-type silicon single crystal substrate, measuring its thickness using a traceable thickness measuring instrument, and growing a second-conductivity-type silicon epitaxial layer on the substrate to create an epitaxial wafer with a p-n junction. This process culminates in measuring the resistivity of the silicon epitaxial layer with an instrument that references a resistivity standard material, such as those from NIST.

Kume's second patent revolves around a C-V characteristic measurement system that boasts improved stability in resistivity during repeated measurements of single crystal silicon wafers. This system includes a mercury probe for electrode contact, an LCR meter to create a depletion layer with a reverse bias voltage, and analysis software that calculates C-V characteristics. A static electricity removal device is also integrated to further enhance the measurement accuracy.

Career Highlights

Fumitaka Kume is currently associated with Shin-Etsu Handotai Co., Ltd., a leader in the semiconductor industry. His innovative work is instrumental in pushing the boundaries of semiconductor applications, particularly in areas that require precise resistivity measurements and C-V characteristics.

Collaborations

Kume has collaborated with esteemed colleagues such as Hisatoshi Kashino and Masayuki Shinohara. Together, they have worked on groundbreaking projects that contribute to advancements in semiconductor technology and research.

Conclusion

Fumitaka Kume's inventions exemplify the vital role that innovative methods play in enhancing semiconductor technologies. His patents not only reflect his expertise but also contribute to the broader scientific community's understanding of semiconductor manufacturing and measurement processes. As he continues to innovate, Kume's work stands as a testament to the potential of creativity and dedication in advancing technology.