For the Inventor, By the Inventor

Enter inventor name

Fumihiro Kamimura

USPTO Granted Patents = 10 (Patent Applications = 1)

EPO Patents = 1

Average Co-Inventor Count = 3.6

ph-index = 2

Forward Citations = 8(Granted Patents)

Location History:

Tosu, JP (2012 - 2016)
Koshi, JP (2013 - 2023)
Kumamoto, JP (2017 - 2024)

Company Filing History:

10 out of 10,295

Tokyo Electron Limited

Years Active: 2012-2025

Loading Chart...

Loading Chart...

10 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 12362202 - Substrate processing method and substrate processing apparatus (2025-07-15),

2. 11869777 - Substrate processing method and substrate processing apparatus (2024-01-09),

3. 11712710 - Substrate processing apparatus and substrate processing method (2023-08-01),

4. 10811266 - Substrate liquid processing apparatus and method, and computer-readable storage medium storing substrate liquid processing program (2020-10-20),

5. 9627192 - Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing program (2017-04-18),

6. 9415356 - Chemical-liquid mixing method and chemical-liquid mixing apparatus (2016-08-16),

7. 9339775 - Chemical-liquid mixing method and chemical-liquid mixing apparatus (2016-05-17),

8. 9099502 - Chemical-liquid mixing method and chemical-liquid mixing apparatus (2015-08-04),

9. 8475668 - Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein (2013-07-02),

10. 8303723 - Liquid processing apparatus, liquid processing method, and storage medium (2012-11-06),

I specialize in innovations, inventions, inventors, patent attorneys, assignees, and patents.

This text is generated by artificial intelligence and may not be accurate.

Please report any incorrect information to support@idiyas.com

Loading…