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For the Inventor, By the Inventor

Tosu, Japan

Fumihiro Kamimura

This inventor holds 11 USPTO granted patents and 1 published patent application and 1 EPO patent. Top assignee: Tokyo Electron Limited. Active years: 2012-2026.

USPTO Granted Patents = 11 

% Patents Active = 63.6


Average Co-Inventor Count = 3.4

ph-index = 2

Forward Citations = 9(Granted Patents)


Location History:

  • Tosu, JP (2012 - 2016)
  • Koshi, JP (2013 - 2023)
  • Kumamoto, JP (2017 - 2024)

Company Filing History:

goldMedal11 out of 10,837 
 
Tokyo Electron Limited
 patents

Years Active: 2012-2026

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11 patents (USPTO):Explore Patents
1. 12525469 - Substrate processing method and substrate processing apparatus (2026-01-13),
2. 12362202 - Substrate processing method and substrate processing apparatus (2025-07-15),
3. 11869777 - Substrate processing method and substrate processing apparatus (2024-01-09),
4. 11712710 - Substrate processing apparatus and substrate processing method (2023-08-01),
5. 10811266 - Substrate liquid processing apparatus and method, and computer-readable storage medium storing substrate liquid processing program (2020-10-20),
6. 9627192 - Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing program (2017-04-18),
7. 9415356 - Chemical-liquid mixing method and chemical-liquid mixing apparatus (2016-08-16),
8. 9339775 - Chemical-liquid mixing method and chemical-liquid mixing apparatus (2016-05-17),
9. 9099502 - Chemical-liquid mixing method and chemical-liquid mixing apparatus (2015-08-04),
10. 8475668 - Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein (2013-07-02),
11. 8303723 - Liquid processing apparatus, liquid processing method, and storage medium (2012-11-06),

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