The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Jun. 25, 2015
Tokyo Electron Limited, Tokyo-To, JP;
TOKYO ELECTRON LIMITED, Tokyo-To, JP;
Abstract
The present invention provides a chemical-liquid mixing method and a chemical-liquid mixing apparatus capable of sufficiently generating a peroxornonosulfuric acid that is effective in removing a resist from a substrate, when a sulfuric acid and a hydrogen peroxide solution are mixed with each other. At first, an inner tankis filled up with a sulfuric acid and the sulfuric acid overflowing from the inner tankis allowed to flow into an outer tank. Then, a hydrogen peroxide solution is supplied into the inner tankand the hydrogen peroxide solution is allowed to flow into the outer tankwhereby the two kinds of liquids of the hydrogen peroxide solution and the sulfuric acid are stored in the outer tank. Simultaneously when the hydrogen peroxide solution flows into the outer tank, a return pumpis activated.