Location History:
- Yokohama, JP (1994 - 1996)
- Tokyo, JP (1996)
Company Filing History:
4 out of 10,295 
1 out of 71 
Years Active: 1994-1996
Title: Fumihiko Higuchi: Innovator in Plasma Etching Technology
Introduction
Fumihiko Higuchi is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of semiconductor technology, particularly in plasma etching methods. With a total of 4 patents to his name, Higuchi's work has had a lasting impact on the industry.
Latest Patents
Higuchi's latest patents include an innovative etching method for silicon-containing layers. This method involves plasma-etching a polysilicon layer of a semiconductor wafer, where the polysilicon layer is formed on an SiO₂ film. In this process, plasma of a processing gas, which includes a halogen element and a gas containing oxygen or nitrogen, is generated. A predetermined portion of the polysilicon layer is selectively exposed in plasma, allowing for precise etching of that portion. Another notable patent is for a magnetron plasma processing system. This system features multiple processing chambers connected to a common transfer chamber. Each processing chamber is equipped with a pair of counter electrodes for generating an electric field and a magnet mechanism for creating a magnetic field with an N-S axis that crosses the electric field. The rotation of the magnetic fields is controlled by a controller, ensuring synchronized movement.
Career Highlights
Throughout his career, Fumihiko Higuchi has worked with notable companies such as Tokyo Electron Limited and Tokyo Electron Yamanashi Limited. His experience in these organizations has allowed him to refine his expertise in semiconductor manufacturing processes.
Collaborations
Higuchi has collaborated with esteemed colleagues, including Yoshio Fukasawa and Masaru Hori. These partnerships have contributed to the advancement of technology in the semiconductor industry.
Conclusion
Fumihiko Higuchi's innovative work in plasma etching technology has established him as a key figure in the semiconductor field. His patents and collaborations reflect his commitment to advancing technology and improving manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.