Company Filing History:
Years Active: 2017-2024
Title: Florian Baumer: Innovator in Metrology Systems
Introduction
Florian Baumer is a prominent inventor based in Oberkochen, Germany. He has made significant contributions to the field of metrology, particularly in the measurement of laser beams in advanced technologies. With a total of 5 patents to his name, Baumer continues to push the boundaries of innovation in his field.
Latest Patents
Baumer's latest patents include a metrology system and method for measuring an excitation laser beam in an EUV plasma source. This innovative system features a first beam analysis system that analyzes a measurement beam coupled from the excitation laser beam before it reflects on the target material. Additionally, it includes a second beam analysis system for analyzing a measurement beam after reflection. Each system is equipped with at least one wavefront sensor system to enhance measurement accuracy.
Another notable patent is a device and method for measuring the beam angle of a light beam guided by a beam guiding optical unit. This apparatus consists of a light intensity sensor arrangement and a focusing unit that directs the light beam to a specified location on the sensor. An adjustment unit is incorporated to maintain the relative position of the intensity centroid of the light beam, ensuring consistent measurements despite changes in beam angle.
Career Highlights
Florian Baumer is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and metrology. His work at this esteemed organization has allowed him to develop cutting-edge technologies that are essential for various applications in the industry.
Collaborations
Throughout his career, Baumer has collaborated with talented individuals such as Matthias Manger and Christoph Petri. These partnerships have fostered a creative environment that encourages innovation and the development of new ideas.
Conclusion
Florian Baumer is a distinguished inventor whose work in metrology systems has made a significant impact on the field. His innovative patents and collaborations with industry professionals highlight his commitment to advancing technology.
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