The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
Jun. 06, 2021
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Christoph Petri, Oberkochen, DE;
Daniel Runde, Oberkochen, DE;
Florian Baumer, Oberkochen, DE;
Ulrich Mueller, Aalen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
When replacing a mirror in a projection exposure apparatus, a mirror for replacement is initially removed (). Position- and orientation data of the removed mirror for replacement are measured () by a position -and orientation data measuring device. Furthermore, position- and orientation data of a replacement mirror, to be inserted in place of the mirror for replacement, are measured () using the position- and orientation data measuring device. Bearing points of the replacement mirror are reworked () on the basis of ascertained differences between, firstly, the position- and orientation data of the mirror for replacement and, secondly, the position- and orientation data of the replacement mirror. The reworked replacement mirror is installed (). This yields a mirror replacement method, in which an adjustment outlay of the replacement mirror in the projection exposure apparatus is reduced.