Company Filing History:
Years Active: 2017-2022
Title: Christoph Petri: Innovator in Projection Exposure Technology
Introduction
Christoph Petri is a notable inventor based in Oberkochen, Germany. He has made significant contributions to the field of projection exposure technology, holding a total of 5 patents. His work focuses on improving the efficiency and effectiveness of optical elements used in advanced projection systems.
Latest Patents
Among his latest patents, Christoph Petri has developed a method for replacing a mirror in a projection exposure apparatus. This innovative method involves the removal of a mirror for replacement, measuring the position and orientation data of the removed mirror, and subsequently measuring the data of the replacement mirror. The process includes reworking the bearing points of the replacement mirror based on the differences in data, ultimately reducing the adjustment outlay required for installation. Another significant patent involves a method for producing a reflecting optical element suitable for the EUV wavelength range, which includes a substrate, a protection layer, and a layer partial system. This method enhances the production of optical elements critical for projection exposure apparatuses.
Career Highlights
Christoph Petri is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and technologies. His work at Zeiss has positioned him as a key player in advancing projection exposure technologies.
Collaborations
Throughout his career, Christoph has collaborated with notable colleagues, including Daniel Runde and Walter Pauls. These collaborations have contributed to the development of innovative solutions in the field.
Conclusion
Christoph Petri's contributions to projection exposure technology through his patents and work at Carl Zeiss SMT GmbH highlight his role as a significant innovator in the industry. His advancements continue to influence the efficiency of optical systems used in various applications.