The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2017
Filed:
Nov. 09, 2016
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Matthias Manger, Aalen-Unterkochen, DE;
Florian Baumer, Oberkochen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A system and a method for analyzing a light beam guided by a beam guiding optical unit. The system has a graduated neutral density filter arrangement (), which is arranged in a far field plane of the beam guiding optical unit and has at least one graduated neutral density filter () having a spatially varying transmission, and a light intensity sensor arrangement having at least one light intensity sensor (), which is arranged in a near field plane of the beam guiding optical unit and is configured to measure (), for each graduated neutral density filter () of the graduated neutral density filter arrangement (), a light intensity transmitted by each graduated neutral density filter.