Company Filing History:
Years Active: 2000-2011
Title: Fa-Yuan Chang: Innovator in Semiconductor Technology
Introduction
Fa-Yuan Chang is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on innovative methods that enhance the fabrication and bonding processes in microelectronic devices.
Latest Patents
One of his latest patents is a semiconductor fabrication method suitable for MEMS. This method involves depositing a layer of sacrificial material in a designated region above a substrate, which is separate from another region where a corrosion-resistant film is applied. The process includes removing the first portion of the corrosion-resistant film through chemical mechanical polishing and etching the sacrificial material selectively.
Another notable patent is a process for wafer bonding, which outlines a method for manufacturing microelectronic devices. This method includes forming a top metal layer on a substrate, applying a dielectric layer, and performing a chemical mechanical polishing process before bonding the first substrate to a second substrate. These innovations are crucial for advancing microelectronic device manufacturing.
Career Highlights
Fa-Yuan Chang is currently employed at Taiwan Semiconductor Manufacturing Company Ltd. His expertise in semiconductor fabrication has positioned him as a key player in the industry. His patents reflect his commitment to improving manufacturing processes and enhancing device performance.
Collaborations
Throughout his career, Fa-Yuan has collaborated with notable colleagues, including Hua-Shu Ivan Wu and Ming-Yeon Hung. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor field.
Conclusion
Fa-Yuan Chang's contributions to semiconductor technology through his innovative patents and collaborations highlight his role as a leading inventor in the industry. His work continues to influence the future of microelectronic device manufacturing.