Erich Daub

Title: Erich Daub: Innovating Semiconductor Thermal Treatments

Introduction

Erich Daub is a distinguished inventor based in Emmerting, Germany, known for his innovative contributions to semiconductor technology. With a total of four patents to his name, Daub has made significant advancements that enhance the efficiency and performance of semiconductor wafers, particularly those composed of monocrystalline silicon.

Latest Patents

Among his latest patents, Daub has developed a support ring that facilitates the thermal treatment of semiconductor wafers. This support ring features outer and inner lateral surfaces with a uniquely curved surface designed for optimal wafer placement. For 300 mm diameter wafers, the curvature radius ranges between 6000 mm to 9000 mm, while for 450 mm wafers, it extends from 9000 mm to 14,000 mm. The utilization of this support ring during thermal treatment has demonstrated a reduction in slip and an enhancement in wafer nanotopography.

Additionally, Daub has patented a method for creating an epitaxially coated silicon wafer. This wafer includes a plane surface that misorients relative to the {110} crystal plane, where the <110> direction is slightly tilted, providing precise control over angles for improved performance. The defined ranges for angles θ and φ are between 0° to 3° and 45° to 90° respectively, ensuring flexibility for various equivalent directions.

Career Highlights

Erich Daub has built an impressive career at Siltronic AG, a leading company in the manufacture of silicon wafers. His work focuses on leveraging innovative technologies to enhance product quality and operational efficiency within the semiconductor segment.

Collaborations

Throughout his career, Daub has collaborated with other talented engineers, including Wilfried von Ammon and Timo Mueller. These collaborations have allowed for a dynamic exchange of ideas, resulting in significant contributions to the field of semiconductor engineering.

Conclusion

Erich Daub's inventive spirit and technical expertise have positioned him as a key figure in semiconductor innovation. With his groundbreaking patents and contributions to Siltronic AG, he continues to pave the way for advancements in thermal treatment processes for semiconductor technology. His work not only boosts industry standards but also inspires future innovators in the field.