Eric A Pape

This inventor holds 39 USPTO granted patents and 17 published patent applications, primarily in Electrostatic Chuck Technology. Top assignees: Lam Research Corporation, Other. Active years: 2004-2026.

USPTO Granted Patents = 39 (Patent Applications = 17)

% Patents Active = 94.9

Average Co-Inventor Count = 2.7

ph-index = 7

Forward Citations = 168(Granted Patents)

Location History:

Pasadena, CA (US) (2004)
Newark, CA (US) (2011 - 2015)
Sunnyvale, CA (US) (2018 - 2020)
Santa Cruz, CA (US) (2022)
Acton, CA (US) (2022 - 2023)
Campbell, CA (US) (2016 - 2024)

Company Filing History:

38 out of 3,928

Lam Research Corporation

patents

1 out of 834,307

Other

patents

Years Active: 2004-2026

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Areas of Expertise:

Electrostatic Chuck

Substrate Temperature Control

Thermal Management

Plasma Processing

Heater Designs

Temperature Measurement

Erosion Containment

Predictive Maintenance

Optical Emission Spectra

Ceramic Coating

Power Switching

Wafer Uniformity

39 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12671064 - Component with protective surface for processing chamber (2026-06-30),

2. 12387964 - Matched tcr joule heater designs for electrostatic chucks (2025-08-12),

3. 12249490 - Single crystal metal oxide plasma chamber component (2025-03-11),

4. 12074049 - Permanent secondary erosion containment for electrostatic chuck bonds (2024-08-27),

5. 12060636 - Method for conditioning a plasma processing chamber (2024-08-13),

6. 12020960 - Determining and controlling substrate temperature during substrate processing (2024-06-25),

7. 11791189 - Reflectometer to monitor substrate movement (2023-10-17),

8. 11430688 - Two-stage pin lifter for de-chuck operations (2022-08-30),

9. 11384430 - Method for conditioning a ceramic coating (2022-07-12),

10. 11133211 - Ceramic baseplate with channels having non-square corners (2021-09-28),

11. 10978323 - Substrate holder having integrated temperature measurement electrical devices (2021-04-13),

12. 10770363 - Power switching system for ESC with array of thermal control elements (2020-09-08),

13. 10764966 - Laminated heater with different heater trace materials (2020-09-01),

14. 10707110 - Matched TCR joule heater designs for electrostatic chucks (2020-07-07),

15. 10690414 - Multi-plane heater for semiconductor substrate support (2020-06-23),

Title: The Inventive Mind of Eric A Pape

Introduction: Eric A Pape is a distinguished inventor based in Campbell, CA (US) known for his groundbreaking contributions to various fields.

Latest Patents: Eric A Pape holds several patents in the areas of technology, healthcare, and consumer products, showcasing his versatility and innovative spirit.

Career Highlights: With a career spanning over two decades, Eric A Pape has worked with leading companies to develop cutting-edge solutions that have revolutionized industries.

Collaborations: Throughout his career, Eric A Pape has collaborated with top researchers, engineers, and designers to bring his ideas to life, resulting in successful products and technologies.

Conclusion: Eric A Pape's passion for innovation and his relentless pursuit of excellence continue to inspire the next generation of inventors and shape the future of technology.