The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
Jul. 01, 2019
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Hong Shih, Santa Clara, CA (US);
Xiaomin Bin, San Jose, CA (US);
Duane Outka, Fremont, CA (US);
Eric A. Pape, Santa Cruz, CA (US);
Gregory A. Pilgrim, Ithaca, NY (US);
Girish M. Hundi, Dublin, CA (US);
Cliff La Croix, Gardnerville, NV (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4407 (2013.01); H01J 37/32477 (2013.01); H01J 37/32862 (2013.01);
Abstract
A method for conditioning ceramic coating on a part for use in a plasma processing chamber is provided. The ceramic coating is wetted with a solution, wherein the solution is formed by mixing a solvent with an electrolyte, wherein from 1% to 10% of the electrolyte dissociates in the solution. The ceramic coating is blasted with particles. The ceramic coating is rinsed.