The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2026
Filed:
Jan. 26, 2021
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Pylin Sarobol, Tigard, OR (US);
Eric Samulon, Oakland, CA (US);
Pankaj Hazarika, Sherwood, OR (US);
Dennis Smith, San Jose, CA (US);
Kurt Kern, Tigard, OR (US);
Debanjan Das, Milpitas, CA (US);
Darrell Ehrlich, San Jose, CA (US);
Eric A Pape, Santa Cruz, CA (US);
Matthew Brian Schick, Pflugerville, TX (US);
Assignee:
LAM Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); B23K 26/352 (2014.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01); H10P 72/72 (2026.01);
U.S. Cl.
CPC ...
H01J 37/32477 (2013.01); B23K 26/355 (2018.08); H01J 37/32715 (2013.01); B23K 2101/40 (2018.08); B23K 2103/56 (2018.08); H01J 2237/2007 (2013.01); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01); H10P 72/722 (2026.01);
Abstract
A component for use inside a semiconductor chamber with a laser textured surface facing a vacuum region inside the semiconductor chamber is provided.