This inventor holds 19 USPTO granted patents and 13 published patent applications and 1 EPO patent, primarily in Semiconductor Processing. Top assignee: Lam Research Corporation. Active years: 2015-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2015-2026
Areas of Expertise:
Title: **Darrell Ehrlich: Innovating Plasma Processing Technologies**
Introduction
Darrell Ehrlich, an accomplished inventor based in San Jose, CA, has made significant contributions to the field of plasma processing technology. With a total of 12 patents to his name, he continues to push the boundaries of innovation in this specialized area.
Latest Patents
Among his latest inventions are two noteworthy patents that enhance the efficiency and functionality of electrostatic chucks used in plasma processing chambers. The first is an "Electrostatic Chuck System for a Plasma Processing Chamber," which features a base plate made of aluminum-silicon carbide (Al—SiC) and includes a ceramic plate bonded to the base plate for improved performance. The second patent, titled "Electrostatic Chuck with Ceramic Monolithic Body," introduces a monolithic ceramic structure equipped with multiple electrodes for managing chucking signals. This design also integrates gas channels and coolant channels to optimize temperature control during substrate processing.
Career Highlights
Darrell Ehrlich currently serves as a valuable member of Lam Research Corporation, where he collaborates with a talented team to innovate advanced technologies in semiconductor manufacturing. His work significantly contributes to the company's mission of providing cutting-edge solutions for the processing of semiconductor materials.
Collaborations
In his career, Darrell has had the opportunity to work alongside skilled colleagues such as Eric A Pape and Daniel Arthur Brown. Together, they share knowledge and expertise, fostering an environment of creativity and collaborative innovation within the company.
Conclusion
Darrell Ehrlich's dedication to advancing plasma processing technology is evident through his impressive portfolio of patents and collaborative efforts at Lam Research Corporation. His innovative contributions continue to shape the landscape of semiconductor manufacturing, reflecting the impact of skilled inventors in driving technological progress.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile