The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2019
Filed:
Feb. 13, 2018
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Darrell Ehrlich, San Jose, CA (US);
Daniel Arthur Brown, Brentwood, CA (US);
Ian Kenworthy, Campbell, CA (US);
Assignee:
LAM RESEARCH CORPORATION, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/3065 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32541 (2013.01); H01J 37/3244 (2013.01); H01J 37/32091 (2013.01); H01J 37/32522 (2013.01); H01L 21/3065 (2013.01); C23C 16/4557 (2013.01); Y10T 29/49002 (2015.01); Y10T 29/49083 (2015.01); Y10T 29/49098 (2015.01); Y10T 29/49117 (2015.01); Y10T 29/49803 (2015.01);
Abstract
A compression member for use in a showerhead electrode assembly of a capacitively coupled plasma chamber. The member applies a compression force to a portion of a film heater adjacent a power supply boot on an upper surface of a thermal control plate and is located between the thermal control plate and a temperature-controlled top plate. The member is composed of an electrically insulating elastomeric material which can work over a large range of compressions and temperatures.