The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2025
Filed:
Feb. 03, 2021
Lam Research Corporation, Fremont, CA (US);
Alexander Matyushkin, San Jose, CA (US);
Keith Comendant, Fremont, CA (US);
Adam Christopher Mace, Morgan Hill, CA (US);
Darrell Ehrlich, San Jose, CA (US);
John Holland, San Jose, CA (US);
Felix Leib Kozakevich, Sunnyvale, CA (US);
Alexei Marakhtanov, Albany, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An edge ring system comprising a substrate support configured to support a substrate during plasma processing and including a baseplate and an upper layer arranged on the baseplate. An edge ring support includes a first body and an electrostatic clamping electrode arranged in the first body. The edge ring support is arranged above the baseplate and radially outside of the substrate during processing. An edge ring includes a second body arranged on and electrostatically clamped to the edge ring support during plasma processing.