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Years Active: 1999-2025
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Title: Innovations and Contributions of Felix Leib Kozakevich
Introduction
Felix Leib Kozakevich is a notable inventor based in Sunnyvale, California, recognized for his significant contributions to the field of plasma processing technology. With an impressive portfolio of 51 patents, Kozakevich has made substantial advancements that enhance the efficiency and uniformity of processes in semiconductor manufacturing.
Latest Patents
Among Kozakevich's latest innovations are two pivotal patents:
1. **Systems and methods for using binning to increase power during a low frequency cycle** - This method aims to achieve uniformity in the etch rate by analyzing voltage signals and adjusting the frequency of a radio frequency generator. It involves receiving a voltage signal, determining its crossings, and dividing the signal's cycle into bins to optimize the etch rate.
2. **Process control for ion energy delivery using multiple generators and phase control** - This patent introduces a comprehensive method for applying RF power in a plasma process chamber. It combines signals from multiple generators, creating a combined RF signal that approximates a sloped square wave shape for enhanced efficiency in plasma processes.
Career Highlights
Kozakevich has worked at respected organizations such as Lam Research Corporation and MKS Instruments, Inc., where he has contributed to pioneering technologies that support semiconductor fabrication processes. His work primarily focuses on plasma systems that are critical for manufacturing integrated circuits.
Collaborations
Throughout his career, Kozakevich has collaborated with esteemed colleagues, including Alexei Marakhtanov and John Patrick Holland. These partnerships have fostered an environment of innovation, allowing for the development of groundbreaking technologies that address complex challenges in the industry.
Conclusion
Felix Leib Kozakevich's extensive patent portfolio and collaborative efforts underline his impact on the semiconductor manufacturing landscape. His innovative methods not only improve process efficiency but also contribute to the advancement of technology that underpins the electronics we use today.