The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2024
Filed:
Sep. 21, 2021
Mks Instruments, Inc., Andover, MA (US);
Lam Research Corporation, Fremont, CA (US);
Aaron T. Radomski, Conesus, NY (US);
Benjamin J. Gitlin, Rochester, NY (US);
Larry J. Fisk, II, Fairport, NY (US);
Mariusz Oldziej, Avon, NY (US);
Aaron M. Burry, Ontario, NY (US);
Jonathan W. Smyka, Rochester, NY (US);
Alexei Marakhtanov, Albany, CA (US);
Bing Ji, Pleasanton, CA (US);
Felix Leib Kozakevich, Sunnyvale, CA (US);
John Holland, San Jose, CA (US);
Ranadeep Bhowmick, San Jose, CA (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.