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Andover, MA, United States of America

Mks Instruments, Inc.

USPTO Granted Patents = 539

EPO Patents = 142

Trademarks = 45

Forward Citations = 8,093

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452 inventors (with patents filed for the assignee):

Junhua Ding (44 out of 45 patents)

Ali Shajii (44 out of 66 patents)

David J Coumou (35 out of 51 patents)

4. Aaron T Radomski (34 out of 41 patents)

5. Xing Chen (32 out of 47 patents)

6. Gerardo A Brucker (29 out of 33 patents)

7. Youfan Gu (24 out of 24 patents)

8. Gordon Hill (20 out of 21 patents)

9. Jesse E Ambrosina (19 out of 44 patents)

10. Michael L'Bassi (18 out of 18 patents)

11. Timothy C Swinney (18 out of 18 patents)

12. Siddharth P Nagarkatti (16 out of 22 patents)

13. Nicholas Kottenstette (16 out of 16 patents)

14. Larry J Fisk, Ii (15 out of 15 patents)

15. Ulrich Alfred Brammer (15 out of 17 patents)

Core Competencies:

Pulse Gas Delivery

Gas Purity Analyzer

Mass Flow Control

Impedance Matching

Plasma Generation

Thermal Conductivity Gauge

Radical Particle Monitoring

Extremum-Seeking Control

Power Supply Apparatus

Ion Source Analysis

Reactive Process Gas Isolation

Ozonated Water Delivery

539 patents: Sort by Forward Citations

1. 12360093 - Method and apparatus for pulse gas delivery with concentration measurement (2025-07-15),

2. 12306160 - Binary gas purity analyzer (2025-05-20),

3. 12289820 - Method and apparatus for impedance matching in a power delivery system for remote plasma generation (2025-04-29),

4. 12287655 - Method and apparatus for mass flow control (2025-04-29),

5. 12278090 - Enhanced tuning methods for mitigating RF load impedance variations due to periodic disturbances (2025-04-14),

6. 12272523 - Extremum-seeking control apparatuses and methods for automatic frequency tuning (2025-04-08),

7. 12265057 - Monitoring radical particle concentration using mass spectrometry (2025-04-01),

8. 12264950 - Method and apparatus for mass flow verification (2025-04-01),

9. 12207385 - Method and apparatus for plasma ignition in toroidal plasma sources (2025-01-21),

10. 12183549 - Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances (2024-12-31),

11. 12181366 - Thermal conductivity gauge (2024-12-31),

12. 12159765 - Method and apparatus for plasma generation (2024-12-03),

13. 12131884 - Pulse and bias synchronization methods and systems (2024-10-29),

14. 12123794 - Pirani gauge with model of power dissipation (2024-10-22),

15. 12087549 - Demagnetizing coils for linearity improvement of current ratio of plasma processing systems (2024-09-10),

MKS Instruments, Inc. is a global provider of instruments, subsystems, and process control solutions in the fields of semiconductor, industrial technologies, life and health sciences, and research.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

539 Patents

#3 in Andover, MA

#52 in Massachusetts

#871 in US

#1,747 in the World

Andover, MA, United States of America

Mks Instruments, Inc.

Forward Citations = 8,093

452 inventors:

Junhua Ding (44 out of 45 patents)

Ali Shajii (44 out of 66 patents)

David J Coumou (35 out of 51 patents)

4. Aaron T Radomski (34 out of 41 patents)

5. Xing Chen (32 out of 47 patents)

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