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For the Inventor, By the Inventor

Andover, MA, United States of America

Mks Instruments, Inc.


USPTO Granted Patents = 539

% Expired Patents = 10.6


Trademarks = 40

Forward Citations = 8,323

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451 inventors (with patents filed for the assignee):

goldMedal Junhua Ding (44 out of 46 patents)

silverMedal Ali Shajii (44 out of 70 patents)

bronzeMedal David J Coumou (35 out of 54 patents)

4.  Aaron T Radomski (34 out of 46 patents)

5.  Xing Chen (32 out of 47 patents)

6.  Gerardo A Brucker (29 out of 33 patents)

7.  Youfan Gu (24 out of 24 patents)

8.  Gordon Hill (20 out of 21 patents)

9.  Jesse E Ambrosina (19 out of 44 patents)

10.  Michael L'Bassi (18 out of 19 patents)

11.  Timothy C Swinney (18 out of 18 patents)

12.  Siddharth P Nagarkatti (16 out of 22 patents)

13.  Nicholas Kottenstette (16 out of 16 patents)

14.  Larry J Fisk, Ii (15 out of 15 patents)

15.  Ulrich Alfred Brammer (15 out of 17 patents)


Core Competencies:
Plasma Generation
Mass Flow Control
Gas Delivery
RF Impedance Matching
Gas Analyzer
Thermal Conductivity Gauge
Pressure Control
Remote Plasma
Adaptive Control
Pirani Gauge
Microwave Energy
Radical Detection

539 patents:

1. 12360093 - Method and apparatus for pulse gas delivery with concentration measurement (2025-07-15),
2. 12306160 - Binary gas purity analyzer (2025-05-20),
3. 12289820 - Method and apparatus for impedance matching in a power delivery system for remote plasma generation (2025-04-29),
4. 12287655 - Method and apparatus for mass flow control (2025-04-29),
5. 12278090 - Enhanced tuning methods for mitigating RF load impedance variations due to periodic disturbances (2025-04-14),
6. 12272523 - Extremum-seeking control apparatuses and methods for automatic frequency tuning (2025-04-08),
7. 12265057 - Monitoring radical particle concentration using mass spectrometry (2025-04-01),
8. 12264950 - Method and apparatus for mass flow verification (2025-04-01),
9. 12207385 - Method and apparatus for plasma ignition in toroidal plasma sources (2025-01-21),
10. 12183549 - Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances (2024-12-31),
11. 12181366 - Thermal conductivity gauge (2024-12-31),
12. 12159765 - Method and apparatus for plasma generation (2024-12-03),
13. 12131884 - Pulse and bias synchronization methods and systems (2024-10-29),
14. 12123794 - Pirani gauge with model of power dissipation (2024-10-22),
15. 12087549 - Demagnetizing coils for linearity improvement of current ratio of plasma processing systems (2024-09-10),
MKS Instruments, Inc. is a global provider of instruments, subsystems, and process control solutions in the fields of semiconductor, industrial technologies, life and health sciences, and research.
This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Sep 15 2026

Mks Instruments, Inc.
539 Patents

#1 in Andover, MA

#51 in Massachusetts

#909 in US

#1,801 in the World

Andover, MA (US)
Andover, MA, United States of America

Mks Instruments, Inc.

Forward Citations = 8,323

451 inventors:

goldMedal Junhua Ding (44 out of 46 patents)

silverMedal Ali Shajii (44 out of 70 patents)

bronzeMedal David J Coumou (35 out of 54 patents)

4.  Aaron T Radomski (34 out of 46 patents)

5.  Xing Chen (32 out of 47 patents)

Please report any incorrect information to [email protected]
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