The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
Jan. 11, 2021
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventors:
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01N 33/00 (2006.01); G01F 1/76 (2006.01); G01F 15/00 (2006.01); G05D 11/13 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01N 33/0067 (2013.01); G01F 1/76 (2013.01); G01N 33/0073 (2013.01); G05D 11/138 (2013.01); G05D 11/139 (2013.01); G01F 15/005 (2013.01); H01L 21/67253 (2013.01);
Abstract
A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.