The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Oct. 11, 2022
Mks Instruments, Inc., Andover, MA (US);
Gerardo A. Brucker, Longmont, CO (US);
Scott C. Heinbuch, Fort Collins, CO (US);
Timothy C. Swinney, Fort Collins, CO (US);
MKS INSTRUMENTS, INC., Andover, MA (US);
Abstract
A thermal conductivity gauge implements a model of power dissipation to accurately measure gas pressure. An envelope surrounds a gas volume, and a sensor wire is positioned within the gas volume. The controller provides a model of power dissipation from the thermal conductivity gauge, including power loss due to conductive heat loss from sensor wire end contacts, radiative loss from the sensor wire toward the gas envelope, and pressure dependent conductive heat loss from the sensor wire through surrounding gas. The controller then applies a power input to the sensor wire to heat the sensor wire, and measures total power dissipation W, sensor wire temperature T, and envelope temperature Tduring the application of the power input. Gas pressure within the envelope is determined based on the measured W, Tand Tand the model of power dissipation.