The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Sep. 10, 2018
Lam Research Corporation, Fremont, CA (US);
Alejandro Sanchez, Mountain View, CA (US);
Grayson Ford, San Jose, CA (US);
Darrell Ehrlich, San Jose, CA (US);
Aravind Alwan, San Jose, CA (US);
Kevin Leung, Dublin, CA (US);
Anthony Contreras, Stockton, CA (US);
Zhumin Han, Fremont, CA (US);
Raphael Casaes, Alameda, CA (US);
Joanna Wu, Redwood City, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.