Zhumin Han

Title: Innovations by Zhumin Han: A Pioneer in Plasma Sheath Technology

Introduction

Zhumin Han, an accomplished inventor based in Fremont, CA, has made significant contributions to the field of plasma technology. With a keen focus on enhancing substrate support systems, he holds a remarkable patent that showcases his innovative spirit. Working with Lam Research Corporation, Han collaborates with fellow engineers to advance the capabilities of plasma sheath technology, ensuring efficiency and precision in manufacturing processes.

Latest Patents

Zhumin Han's patent, titled "Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features," highlights his ingenuity. This invention presents a first edge ring designed for a substrate support mechanism, featuring an annular-shaped body equipped with multiple lift pin receiving elements. The design effectively enables the edge ring to surround the upper portion of the substrate support, enhancing operational efficiency. The annular body's unique structure, with its defined upper and lower surfaces, as well as both radially inner and outer surfaces, allows for precise kinematic coupling with lift pins, facilitating smoother deployment and reconfiguration in plasma applications.

Career Highlights

Throughout his career, Zhumin Han has exemplified a strong commitment to innovation and excellence. His role at Lam Research Corporation allows him to work on cutting-edge technologies that play a critical role in semiconductor manufacturing. With a patent count of one, Han’s inventions reflect a focus on solving complex problems in the field, ultimately contributing to advancements in plasma technology.

Collaborations

Collaboration is key to innovation, and Zhumin Han is fortunate to work alongside talented individuals such as Alejandro Sanchez and Grayson Ford. Together, they explore new frontiers in technology, fostering an environment where creative ideas can blossom into tangible solutions for the industry.

Conclusion

Zhumin Han’s innovative contributions to the field of plasma technology demonstrate the impact that a single inventor can have on advancing industry practices. With his patent focusing on edge ring assemblies, Han stands as a testament to the power of creativity in technology. As he continues to push the boundaries at Lam Research Corporation, the future is bright for this talented inventor.