The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2020
Filed:
May. 03, 2017
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Yuma Ohkura, San Mateo, CA (US);
Darrell Ehrlich, San Jose, CA (US);
Eric A. Pape, Campbell, CA (US);
Assignee:
LAM RESEARCH CORPORATION, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/03 (2006.01); H05B 3/06 (2006.01); H05B 3/28 (2006.01); H05K 1/11 (2006.01); H05K 3/10 (2006.01); H05K 1/02 (2006.01); H05K 1/03 (2006.01); H05B 3/26 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H05K 1/0212 (2013.01); H01L 21/67103 (2013.01); H01L 21/6831 (2013.01); H05B 3/26 (2013.01); H05B 3/265 (2013.01); H05B 3/283 (2013.01); H05K 1/0306 (2013.01); H05K 1/112 (2013.01); H05K 1/113 (2013.01); H05B 2203/016 (2013.01); H05B 2203/037 (2013.01);
Abstract
A substrate support for a substrate processing system includes a plurality of heating zones, a baseplate, a heating layer arranged on the baseplate, a ceramic layer arranged on the heating layer, and wiring provided through the baseplate, the heating layer, and into the ceramic layer in a first zone of the plurality of heating zones. An electrical connection is routed from the wiring in the first zone, across the ceramic layer to a second zone of the plurality of heating zones, and to a heating element in the heating layer in the second zone.