Yuma Ohkura

Title: Yuma Ohkura: Innovator in Substrate Processing Technology

Introduction

Yuma Ohkura is a notable inventor based in San Mateo, CA, who has made significant contributions to the field of substrate processing technology. With a total of 5 patents to his name, he has developed innovative solutions that enhance the efficiency and effectiveness of substrate processing systems.

Latest Patents

One of Yuma Ohkura's latest patents is the RF immune sensor probe for monitoring the temperature of an electrostatic chuck of a substrate processing system. This sensor probe features an elongated body that defines an inner cavity with a printed circuit board fitted within it. A first temperature-sensing integrated circuit is mounted at one end of the printed circuit board, while a cap is positioned adjacent to this circuit. The housing of the probe is designed to be mounted to a baseplate of a substrate support.

Another significant patent is the laminated heater with different heater trace materials. This invention includes a substrate support for a substrate processing system that comprises multiple heating zones and a baseplate. It features at least one heating layer and a ceramic layer arranged on the baseplate, along with a plurality of heating elements. These elements include materials with varying electrical resistances, allowing for optimized heating performance across different zones.

Career Highlights

Yuma Ohkura is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on developing advanced technologies that improve substrate processing, which is critical for the manufacturing of semiconductor devices.

Collaborations

Throughout his career, Yuma has collaborated with several talented individuals, including Darrell Ehrlich and Eric A Pape. These collaborations have contributed to the innovative advancements in substrate processing technologies.

Conclusion

Yuma Ohkura's contributions to substrate processing technology through his patents and work at Lam Research Corporation highlight his role as a key innovator in the field. His inventions continue to influence the efficiency of semiconductor manufacturing processes.