Eric Samulon

Title: Eric Samulon: Innovator in Substrate Processing Technologies

Introduction

Eric Samulon is a notable inventor based in Oakland, CA, who has made significant contributions to the field of substrate processing. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of substrate processing systems.

Latest Patents

One of Eric's latest patents is titled "Coolant channel with internal fins for substrate processing pedestals." This invention involves a baseplate for a substrate support that includes at least one coolant channel designed to retain and distribute coolant throughout the baseplate. The innovative design features fins that extend into the coolant channel, increasing the surface area for improved cooling efficiency.

Another significant patent is "Model-based control of substrate processing systems." This system aims to control parameters within a substrate processing chamber by measuring the plant's response to changes. It utilizes a model generating circuit to determine key characteristics of the plant, allowing for precise control based on predictive modeling.

Career Highlights

Eric Samulon is currently employed at Lam Research Corporation, where he applies his expertise in substrate processing technologies. His work has been instrumental in advancing the capabilities of substrate processing systems, making them more efficient and reliable.

Collaborations

Eric collaborates with talented coworkers, including Tao Zhang and Kai Liu, who contribute to the innovative environment at Lam Research Corporation.

Conclusion

Eric Samulon's contributions to substrate processing technologies through his patents and work at Lam Research Corporation highlight his role as a key innovator in the field. His inventions continue to influence the efficiency of substrate processing systems, showcasing the importance of innovation in technology.