En-Chan Chen

Title: En-Chan Chen: Innovator in Microelectromechanical Systems

Introduction

En-Chan Chen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of microelectromechanical systems (MEMS), holding a total of four patents. His work focuses on advancing semiconductor technology, which plays a crucial role in modern electronics.

Latest Patents

One of En-Chan Chen's latest patents is a microelectromechanical system device. This MEMS device features a first multi-layer structure and a second multi-layer structure positioned over the first. It includes a first semiconductor layer situated between these two structures, along with a first air gap separating the first multi-layer structure from the first semiconductor layer. Additionally, a second air gap separates the first semiconductor layer from the second multi-layer structure. The device incorporates a plurality of semiconductor pillars and second semiconductor pillars, with the first pillars exposed to the first air gap and coupled to the first semiconductor layer and the first multi-layer structure. The second pillars are exposed to the second air gap and coupled to the first semiconductor layer and the second multi-layer structure.

Another notable patent is a method for forming a semiconductor device. This method involves several operations, starting with the formation of a first semiconductor layer over a substrate. A plurality of first pillars is then formed over this first layer. Following this, a second layer is created over the first pillars and the first layer, and a plurality of second pillars is formed over the second layer. Finally, a third layer is established over the second pillars and the second layer.

Career Highlights

En-Chan Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to push the boundaries of MEMS technology and contribute to the advancement of semiconductor devices.

Collaborations

Throughout his career, En-Chan Chen has collaborated with notable colleagues, including Chen Hsiung Yang and Chun-Wen Cheng. These collaborations have fostered innovation and have been instrumental in the development of new technologies in the semiconductor field.

Conclusion

En-Chan Chen is a distinguished inventor whose work in microelectromechanical systems has significantly impacted the semiconductor industry. His innovative patents and contributions continue to shape the future of technology.