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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11577954 B1

PDFFull Text
Date of Patent:
Feb. 14, 2023

Filed:

Dec. 07, 2020

Method for forming semiconductor device

Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Chen Hsiung Yang, Hsinchu County, TW;

Chun-Wen Cheng, Hsinchu County, TW;

Chia-Hua Chu, Hsinchu County, TW;

En-Chan Chen, Hsinchu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;

Attorneys:

WPAT Law

Anthony King

Primary Examiner:

Bilkis Jahan

Assistant Examiner:

Victor V Barzykin

Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01); H04R 19/04 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0051 (2013.01); B81C 1/00158 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0307 (2013.01); B81B 2203/0361 (2013.01); H04R 19/04 (2013.01); H04R 31/00 (2013.01); H04R 2201/003 (2013.01);
Abstract

A method for forming a MEMS device includes following operations. A first semiconductor layer is formed over a substrate. A plurality of first pillars are formed over the first layer. A second layer is formed over the first pillars and the first layer. A plurality of second pillars are formed over the second layer. A third layer is formed over the second pillars and the second layer.

Find Patent Forward Citations

Yang, Chen. (2023). Method for forming semiconductor device (U.S. Patent No. 11577954). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11577954

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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