Company Filing History:
Years Active: 2022-2025
Title: Innovations by Duk Hyun Son
Introduction
Duk Hyun Son is a prominent inventor based in Chungcheongnam-do, South Korea. He has made significant contributions to the field of substrate treatment technology, holding a total of 8 patents. His work focuses on improving the efficiency and effectiveness of substrate handling and treatment processes.
Latest Patents
Duk Hyun Son's latest patents include an "Apparatus for transporting substrate and system for treating substrate with the apparatus." This invention provides a substrate transporting apparatus capable of preventing an increase in temperature of a transporting robot by installing a cooling plate around the transporting robot. The substrate transporting apparatus includes a transporting unit for transporting a substrate and a cooling plate for controlling the temperature of the transporting unit. The cooling plate is either spaced apart from or installed in close contact with the side surface of the transporting unit.
Another notable patent is the "Transfer assembly and apparatus for treating a substrate with the transfer assembly." This substrate treating apparatus features an atmospheric pressure transfer module with a first transfer robot and a vacuum transfer module with a second transfer robot. It also includes a load-lock chamber that can convert between atmospheric pressure and vacuum atmosphere, along with a process chamber for treating the substrate.
Career Highlights
Duk Hyun Son is currently employed at Semes Co., Ltd., where he continues to innovate in the field of substrate treatment technology. His work has been instrumental in advancing the capabilities of substrate handling systems.
Collaborations
Duk Hyun Son collaborates with talented coworkers, including Sun Ho Ha and Mun Gi Jung, who contribute to the development of innovative solutions in their field.
Conclusion
Duk Hyun Son's contributions to substrate treatment technology through his patents and work at Semes Co., Ltd. highlight his role as a key innovator in the industry. His inventions are paving the way for more efficient substrate handling and treatment processes.