Chungcheongnam-do, South Korea

Duk Hyun Son

This inventor holds 15 USPTO granted patents and 4 published patent applications, primarily in Substrate Processing. Top assignees: Semes Co., Ltd., Semes Co., Ltd.. Active years: 2022-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Duk Hyun Son. Retrieved from https://idiyas.com/inventor/duk-hyun-son

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 15 

% Patents Active = 100.0

Average Co-Inventor Count = 1.7

ph-index = 1


Company Filing History:


Years Active: 2022-2026

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Areas of Expertise:
Substrate Processing
Plasma Processing
Transfer Module
Treatment Apparatus
Transportation Apparatus
Equipment Front End Module
Carrier for End Effector
System for Treating Substrate
Process Gas Supply Control
Substrate Storage
Transfer Assembly
Substrate Treatment System
15 patents (USPTO):Explore Patents

Title: Innovations by Duk Hyun Son

Introduction

Duk Hyun Son is a prominent inventor based in Chungcheongnam-do, South Korea. He has made significant contributions to the field of substrate treatment technology, holding a total of 15 patents. His work focuses on improving the efficiency and effectiveness of substrate handling and treatment processes.

Latest Patents

Duk Hyun Son's latest patents include an "Apparatus for transporting substrate and system for treating substrate with the apparatus." This invention provides a substrate transporting apparatus capable of preventing an increase in temperature of a transporting robot by installing a cooling plate around the transporting robot. The substrate transporting apparatus includes a transporting unit for transporting a substrate and a cooling plate for controlling the temperature of the transporting unit. The cooling plate is either spaced apart from or installed in close contact with the side surface of the transporting unit.

Another notable patent is the "Transfer assembly and apparatus for treating a substrate with the transfer assembly." This substrate treating apparatus features an atmospheric pressure transfer module with a first transfer robot and a vacuum transfer module with a second transfer robot. It also includes a load-lock chamber that can convert between atmospheric pressure and vacuum atmosphere, along with a process chamber for treating the substrate.

Career Highlights

Duk Hyun Son is currently employed at Semes Co., Ltd., where he continues to innovate in the field of substrate treatment technology. His work has been instrumental in advancing the capabilities of substrate handling systems.

Collaborations

Duk Hyun Son collaborates with talented coworkers, including Sun Ho Ha and Mun Gi Jung, who contribute to the development of innovative solutions in their field.

Conclusion

Duk Hyun Son's contributions to substrate treatment technology through his patents and work at Semes Co., Ltd. highlight his role as a key innovator in the industry. His inventions are paving the way for more efficient substrate handling and treatment processes.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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